Callibration gratings TGZ

Callibration gratings for Z axis callibrations (step height see variants) and for lateral callibration (3um period).

Parameters

Step material: SiO2

Substrate material: Si

Step period: 3 ±0,05 um

Chip size: 5x5x0,5 mm

Effective area (middle of the square): 3x3 mm

Variants

TGZ1: Step height 20,0 ±1,5 nm

TGZ2: Step height 110 ±2 nm

TGZ3: Step height 520 ±3 nm

TGZ4: Step height 1517 ±250 nm