Callibration grating TGT1

Callibration grating for tip characterization

Parameters

Structure: grating is formed on Si wafer

Pattern: 3D array of sharp spikes

Period: 3 ±0,05 um

Height: 0,3 - 0,5 um

Chip size: 5x5x0,5 mm

Effective area (middle of the square): 2x2 mm

Spike angle: 50 ±10° (on the very end of the spike) 

Spike diameter: <= 10 nm

Diagonal period: 2,12 um