Callibration grating TGQ1

Callibration grating for simultaneous callibration of X,Y and Z axes. A 3D structure is etched on the surface.

Parameters

Step material: SiO2

Substrate material: Si

Pattern: 3D pattern with squares

Step height: 20 ±1,5 nm

Size of square side: 1,5 ±0,35 nm

Chip size: 5x5x0,5 mm

Effective area (middle of the square): 3x3 mm