Callibration grating TGG1

Callibration grating for X or Y axis callibration, detection of lateral or vertical scanner nonlinearity, angular distortion and tip characterisation.

Parameters

Material: Si

Pattern: One dimensional pattern of triangular steps in X or Y direction with precise linear and angular dimensions

Period: 3 ±0,05 um

Chip size: 5x5x0,5 mm

Effective area (middle of the square): 3x3 mm

Angle of the edge: 70°

Diameter of the edge: <= 10 nm