Callibration grating TDG01

Callibration grating for submicron callibration.

Parameters

Structure: grating is formed on chalcogenide glass with Al coating

Pattern: 1D, paralel ridges in X or Y axis

Period: 278 ±1 nm

Height: > 55 nm

Chip size: diameter 12,5 mm, thickness 2,5 mm

Effective area: central diameter 9 mm